C171149 Plasmatherm SLR 720 PECVD / 720 RIE Reactive Ion Etch Deposition System

Description

Plasmatherm SLR 730 PECVD /720 RIE • Stand alone Dual chamber 720/720 Deposition & Etch system • PC controlled–windows based system • Plasmatherm 700 Aluminum body chamber • Load Lock Version with (2) two process modules • One PECVD • One RIE (Reactive Ion Etch) • Main body of system (shared components between the two chambers) includes • Stainless Steel Skins • Windows based PC controls • Advanced Energy RFPP - RF5S power supply (500W – 13.56MHz) • Advanced Energy AM5 matching network w/tuner • Leybold D25 or equivalent Load Lock pump • Neslab HX 75 chiller with RS232 interface to system • Electrical Disconnect box - 208V, 3 phase, 60amp • Flat panel display with keyboard & mouse • Full set of manuals • PECVD Module includes • Heated Chuck • Watlow controller • 11” chuck with center lift type • Optical Windows for Endpoint Control & diagnostics • Leybold D40 with 151 blower (min.) Mechanical pump • MKS 290 Ion Gauge controller and Ion gauge • MKS TC gauge controller • 1 or 2 Torr Baratron • 4 gas MFC’s • RIE module includes • Lower electrode • 11” showerhead • 11” chuck – center lift type • Optical Windows for Endpoint Control & diagnostics • Soffie Class III Laser endpoint detector • MKS 153 Throttle valve • Leybold 361C turbo pump • Leybold 150/360 NT turbo controller • Leybold D40BCS mechanical roughing pump • 500mT Baratron • 4 gas MFC’s Specification from a quotation when the University upgraded the system after the original purchase Gas Manifolds and Gas line fabrication and installation service • Fabricate & install (4) additional gas sticks/lines including Nupro valves, (with bypass valves included), unions, glands, VCR fittings, MFCs and gas manifolds in order to serve the existing Plasmatherm Dual Chamber PECVD/RIE System as listed below. • (2) - 4 port manifolds • (2) - gas sticks for Nitrogen and Argon to include nupro valve, mfc and "L" leg to gas connection • (2) - gas sticks with bypass (highly recommended for Cl2 and BCl3), to include 3 nupro valves and mfc • 2 - 4 channel valve control PCB (for the nupro valves) • 1/8" tubing for the nupro valves (~40 ft) • Re-wiring of the valve control PCB connectors to support this up-fit, plugs, pins and wire as necessary • JVIC will need to move the N2 purge inlet connection to its new location (to support the addition of the 4 port manifold • MFCs will be cleaned and calibrated to Nitrogen for the following flow rates • (2) for the PECVD side of the system • Nitrogen – 2000 sccm • Argon – 500 sccm • (2) for the RIE side of the system • BCL3 - 50 sccm • Cl2 – 50 sccm
This system was working and in use when decommissioned from service at a University lab.
Here are links to a few more pictures:
Back of Neslab HX75 Chiller
Nameplate
The Plasmatherm has already been crated for shipment. Approximate crate dimensions: 77"L x 53"W x 84"H.
The pallet with the pumps on it measures approximately 52"L x 49"W x 37"H.
The Neslab HX75 Chiller measures approximately 22"L x 25"W x 37"H.
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Shipping LTL Freight
The unpacked weight of this item is 4000 pounds.
Buyer pays freight plus a fixed handling fee of .00
dollars
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Freight rate quotes are valid for 10 calendar days from the date quoted.
If a cleared payment has not been received in this time frame, the rate will expire. We reserve the right to re-quote the freight charges in the event of a payment delay.
Freight rate quotes are valid for 10 calendar days from the date quoted.
If a cleared payment has not been received in this time frame, the rate will expire. We reserve the right to re-quote the freight charges in the event of a payment delay.
Auction Terms
Upon end of auction, the winning bidder should proceed to "CheckOut" and will be redirected to our Auction Checkout Page. WE DO NOT TAKE CREDIT CARDS (except through PayPal). All auctioned products are sold as advertised, as is and without warranty. Questions should be asked prior to bidding as all sales are final PAYMENT TERMS ARE PREPAID ONLY.
Payments
ALL AUCTIONS ARE PREPAID ONLY. We accept PayPal payments that are US and Canada Verified with ship-to US and Canada confirmed addresses only. We accept credit card payments through confirmed/verified PayPal accounts only.
California Sales Tax
For all California ship-to locations within Santa Clara County, local sales tax applies. For all California ship-to locations out of Santa Clara County, the current basic state tax rate applies. Orders will be placed on hold for non-payment of taxes.
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"The sale of this item may be subject to regulation by the U.S. Food and Drug Administration and state and local regulatory agencies. If so, please do not bid on this item unless you are an authorized purchaser. If the item is subject to FDA regulation, I will verify your status as an authorized purchaser of this item before shipping of the item."
Outback Equipment Company    Gilroy, California. 95020    (408)886-3700
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